Conference paper

Enhancing Microelectronics Development by Multiphysics Simulations

T. Englisch, C. Gordalla (Comsol Multiphysics GmbH, Germany)

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Receipt of papers:

March 15th, 2024

Notification of acceptance:

April 30th, 2024

Registration opening:

May 1st, 2024

Final paper versions:

May 15th, 2024