SIMULINK and COMSOL Software Application for Modeling and Simulation MEMS Accelerometer

J. Nazdrowicz (Lodz Univ. of Techn., Poland)

In the last few years MEMS accelerometers have achieved huge commercial success thanks to new cheap technologies of manufacturing, new materials and achievements of researches. Due to low weight and low energy consumption, microaccelerometers found wide application in many popular devices expanding their functionality. Commercial fabrication of MEMS and intensive developing require taking advantage of advanced mathematical and engineering tools for modelling and simulation. The objective of this research work is to present designing and simulation capabilities of MEMS devices with mathematical models and Finite Element Method. One of the most famous software to make such analysis is COMSOL Multiphysics. In this article MEMS accelerometer is presented with modeling and simulation processes. Results of simulations are supported with results obtained from Matlab/SIMULINK software and analyzed for displacement response for two of the most popular spring geometries – folded and straight.