Conference paper

Capacitance Deviation Caused by Mechanical Deformation of MEMS Inertial Structure

J. Nazdrowicz, A. Stawiński, A. Napieralski (Lodz Univ. of Techn., Poland)

Authors presents very important problem of estimation capacitance structures used in MEMS sensors. The importance comes from fact that during operation, inertial sensors deform because of acting external forces . Therefore capacitor consists of electrodes deviates from value because variation of electrode orientation.

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Receipt of papers:

March 13th, 2020

Notification of acceptance:

May 18th, 2020

Registration opening:

May 20th, 2020

Final paper versions:

June 5th, 2020