Capacitance Deviation Caused by Mechanical Deformation of MEMS Inertial Structure

J. Nazdrowicz, A. Stawiński, A. Napieralski (Lodz Univ. of Techn., Poland)

Authors presents very important problem of estimation capacitance structures used in MEMS sensors. The importance comes from fact that during operation, inertial sensors deform because of acting external forces . Therefore capacitor consists of electrodes deviates from value because variation of electrode orientation.