Analysis of Thermal and Electrical Properties of Heating Microsystems Based on TCO Layers

M. Lebioda, M. Tomczyk (Lodz Univ. of Techn., Poland)

The analysis of thermal and electrical properties of laser patterned ITO structures on polymer substrate have been presented in this paper. We used ITO layers to produce the coupled microheater and sensor, which are closed in one microsystem. The proposed structure of heating system can be used in wide research area, especially in biology and medicine. The coupled heater and sensor enable development an accurate heating systems with possibility of temperature controlling.